For the determination of the oxygen partial pressure in plasmas and process gases which do not run under normal pressure (deposition methods, surface treatment processes as well as materials research investigations) the ZIROX vacuum probe has been developed. 

Sputtering or spray coating, thermal vaporization, electron beam physical vapour deposition, hollow cathode vaporization, vacuum electric arc vaporization, chemical vapour deposition as well as its plasma aided or metal organic form PECVD and MOCVD are considered typical deposition methods.

More information about Active ThermoProbe can be found on our website.