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Vacuum process control, industrial plasma processes

 

For the determination of the oxygen partial pressure in plasmas and process gases, which do not run under normal pressure (deposition methods, surface treatment processes, material research), the ZIROX vacuum probe was developed. 

Sputtering or spray coating, thermal vaporization, electron beam evaporation, hollow-cathode vaporization, vacuum arc vaporization, chemical vapor deposition as well as its plasma-assisted or metal-organic forms of treatment PACVD and MOCVD are considered typical deposition methods.

 

More information about the active thermal probe can be found on our website.

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